The H-Square AET Automatic Wafer Aligner + Escalator is a tabletop system engineered for precise wafer alignment and ID mark reading in semiconductor manufacturing. It combines automatic notch or flat finding with a precision escalator mechanism that positions wafers in 0.200 inch (5mm) increments, enabling accurate identification and full-lot tracking at significantly lower cost than automated OCR alternatives.
Technical Specifications
• Escalator step precision: 0.200 inch (5mm)
• Notch alignment accuracy: ±1° (150mm and 200mm wafers)
• ESD-safe construction with static dissipative materials and grounded wafer/cassette paths
• Class 1 cleanroom compatible (ISO 3 FS209E)
– Key Features
• Patented notch/flat finding mechanism for automatic wafer orientation
• Operator-selectable tilt angle for enhanced ID readability
• User-friendly control panel interface
• Optional LED light bank for optimized ID reading conditions
• Minimal footprint design suitable for lab and production environments
– Typical Applications
• Full-lot wafer tracking and identification
• ID mark reading and verification
• Macro-inspection operations
– Compatibility & Integration
The AET accommodates 150mm and 200mm wafers with standard cassette interfaces. Model variants exist for specific wafer sizes—the H-Square AETWFA6AC is designated for 150mm wafer processing. The system integrates into Class 1 cleanroom facilities and pairs with H-Square’s complementary wafer handling portfolio, including the ETAS1 manual escalator, HL and WPR individual wafer presenters, BLIS inspection station, AHWT automatic horizontal transfer, and WS300 300mm wafer mover/sorter.
