The HP/Agilent 4280A is a 1 MHz C Meter and C-V Plotter that delivers precision capacitance and conductance measurements for semiconductor device characterization. It combines a high-resolution 1 MHz C-G meter with a programmable DC bias source capable of staircase sweeps, integrated timing control for transient analysis, and comprehensive data acquisition via HP-IB interface. Purpose-built for semiconductor analysis, materials research, and quality control environments.
Technical Specifications
Measurement Functions:
• Capacitance (C), Conductance (G), and simultaneous C&G
• Capacitance vs. DC Bias (C-V) and Conductance vs. DC Bias (G-V)
• Capacitance vs. Time (C-t) and Conductance vs. Time (G-t)
Test Signal:
• Frequency: 1 MHz
• Test signal level: 10 mVrms or 30 mVrms
Capacitance Measurement:
• Range: 0.001 pF to 1.900 nF across 3 ranges
• Resolution: 0.001 pF (most sensitive range); 5½ digits standard display
• Option 001 increases resolution to 6½ digits with offset reference (0 to 1023 pF, 1 pF increment), enabling measurements to 190 pF with 1 pF resolution or up to 1.2 nF with 10 fF resolution
Conductance Measurement:
• Range: Up to 12 mS
• Resolution: 10 µS maximum
DC Bias Source:
• Internal programmable bias: 0 V to +100 V, 1 mV resolution
• External bias: ±42 V, ±100 mA (EXT BIAS SLOW or FAST)
• Staircase sweep capability
Timing Control (C-t):
• Internal pulse generator: 10 ms C-t resolution; 10 µs best-case resolution
• Measurement interval (SLOW C-t): 10 ms to 32 s settable range
• External pulse generator support for intervals as short as 10 µs
Measurement Speed:
• Fast Mode: ~70 ms (C or G only), 150 ms (C and G)
• Medium Mode: ~100 ms (C or G only), 150 ms (C and G)
Accuracy:
• Basic measurement accuracy: 0.1%
• With HP 16082A test cables: Add 0.1% (C) or 0.2% (G)
Data Output:
• HP-IB (IEEE 488) interface; ASCII or binary format
• Block mode storage: 680 data points (C-V/t or G-V/t), 400 data points (C & G-V/t)
– Key Features
• Five-and-a-half to six-and-a-half digit capacitance resolution
• Programmable staircase DC bias sweeps for C-V and G-V characterization
• Millisecond to microsecond timing resolution for transient measurements
• Dual measurement modes (Fast/Medium/Slow) optimize speed versus accuracy trade-offs
• Internal and external bias capability enables flexible test configurations
– Typical Applications
• MOS and junction diode C-V analysis
• Transient capacitance measurements in semiconductor devices
• Material property characterization (permittivity, conductivity)
• Device reliability and aging studies
• Manufacturing process control and quality assurance
– Compatibility & Integration
HP-IB (IEEE 488) remote control and data output enable integration into automated test systems. Compatible with HP 16082A test cables for high-accuracy measurements.
