The HP/Agilent 5517C is a dual-frequency Helium-Neon laser head engineered for precision metrology, interferometry, and semiconductor lithography applications. This continuous-wave source delivers stable red light output at 632.991354 nm with exceptional wavelength accuracy and long-term stability. The 5517C combines high coherence length, tight beam characteristics, and rapid warm-up capability, making it the foundation for demanding measurement systems requiring sub-ppm frequency stability and repeatable performance over instrument lifetime.
Technical Specifications
• Laser Type: Helium-Neon (HeNe), Continuous Wave, Two-Frequency
• Wavelength: 632.991354 nm (nominal 633 nm)
• Output Power: >180 µW minimum; options to 300 µW (H03), 240 µW (H05), and 400 µW (H07); maximum 1 mW
• Beam Diameter: 6 mm standard; 3 mm (Option 003) and 9 mm (Option 009) available
• Beam Divergence: 500:1 (vertical to horizontal)
• Reference Frequency: 2.4 MHz to 3.0 MHz
• Wavelength Accuracy (Vacuum): ±0.1 ppm standard; ±0.02 ppm with optional calibration
• Wavelength Stability (Vacuum): ±2 ppb (1 hour); ±20 ppb (lifetime)
• Coherence Length: >15 m
• Beam Height: 79.5 mm ± 1.0 mm
• Warm-up Time: <1 hour typical; 90 minutes specified
• Maximum Linear Velocity: 711 mm/s (with linear optics); 696 mm/s (with E1709A receiver)
• Power Supply: +15 VDC ±0.3 V at 2.2 A–3.0 A maximum; -15 VDC ±0.3 V at 0.02 A–0.3 A maximum
• Safety Classification: Class II Laser Product
– Key Features
• Dimensions: 127 mm (H) × 102 mm (W) × 152 mm (D); 3.4 kg weight
• Precision mounting feet for minimal alignment requirements
• Rear-panel LED indicators: +15V, -15V, LASER ON, READY
• Three-position shutter (open, reduced, closed) on select models
– Typical Applications
Interferometric measurement, flat panel display manufacturing, semiconductor lithography, precision dimensional metrology, and optical alignment in industrial and research settings.
– Compatibility & Integration
Designed for VME- and PC-based laser interferometer systems including Keysight 5501A, 5527A, and 5572A. Operates with compatible power supplies such as the Agilent 10884B. Compatible with Agilent transducer receivers, including the E1709A.
