The Keithley 4210-CVU is a capacitance-voltage measurement unit for semiconductor device and materials characterization. It performs precise C-V, C-f, and C-t measurements across a 1 kHz to 10 MHz frequency range, with capacitance measurement capability from femtofarads to microfarads. The instrument employs auto-balancing bridge (ABB) technique for accurate impedance measurements and derives multiple parameters including parallel and series configurations with capacitance, conductance, dissipation factor, resistance, reactance, impedance, and phase angle. It mounts within the Keithley 4200-SCS Semiconductor Characterization System and operates under Clarius software control with KITE and KXCI external control support.
## Technical Specifications
**Capacitance Measurement**
• Frequency range: 1 kHz to 10 MHz
• Measurement range: Femtofarads (fF) to microfarads (µF)
• Measurement technique: Auto-balancing bridge (ABB)
• Device configurations: Series (Rs-Cs) or parallel (Cp-Gp)
• Derived parameters: Cp-Gp, Cp-D, Cs-Rs, Cs-D, R-jX, Z-theta
• Open/short compensation available
• Diagnostic validation tools included for C-V test integrity
**Voltage and Bias**
• DC bias voltage range: -30 V to +30 V
• Differential DC bias voltage: 60 V
• AC test signal amplitude: 10 mVRMS to 100 mVRMS
• DC bias resolution: 1 mV
• DC output resistance (4-wire): <100 mΩ
• CVU bias error: <50 µV
• Maximum load capacitance: 10 nF
**Sweep and Data Acquisition**
• Maximum data points: 4096 per sweep
• Sweep types: Linear or custom C-V, C-f, and C-t
## Key Features
• Dual triaxial and 5-way binding post output terminals
• SMA cable connectors supplied
• Operates within 4200-SCS system architecture
• Voltage hazard present above 30 V RMS, 42.4 V peak, or 60 VDC
## Typical Applications
Research and development characterization; semiconductor device analysis; materials property assessment; device parameter extraction; impedance and loss measurements across broad frequency and bias ranges.
## Compatibility & Integration
Installs within Keithley 4200-SCS Semiconductor Characterization System. Controlled via Clarius software, Keithley Interactive Test Environment (KITE), and external computer interface (KXCI).
