The Keithley 4215-CVU Capacitance-Voltage Unit is a specialized measurement module for the 4200A-SCS Parameter Analyzer that delivers femtofarad-range capacitance and AC impedance characterization. It performs C-V, C-f, and C-t sweeps plus multi-frequency impedance analysis across 1 kHz to 10 MHz with attofarad-level resolution. The unit integrates active guarding via shielded triaxial connections and supports up to 4096 measurement points per sweep, making it essential for metal-to-metal capacitance, interconnect characterization, and nano-device terminal measurements on production wafers and in laboratory environments.
Technical Specifications
• Frequency range: 1 kHz to 10 MHz with 1 kHz resolution across 10,000 discrete frequencies
• Capacitance resolution: 1 aF (attofarad)
• Conductance resolution: 1 nS
• Phase angle resolution: 0.001 degrees
• DC bias voltage: ±30 V (60 V differential); expandable via optional modules
• AC drive voltage: 10 mV to 1 V rms
• Current measurement ranges: 1 µA, 30 µA, 1 mA
• Measurement points per sweep: up to 4096
• Noise performance: tens of attofarads achievable with proper technique
– Key Features
• 1 V AC source capability—class-leading amplitude for sensitive device testing
• Active-guarded triaxial connections minimize parasitic effects in low-capacitance measurements
• Multi-sweep modes: capacitance-voltage, capacitance-frequency, capacitance-time, and impedance
• 1 µA range recommended for lowest-capacitance applications
– Typical Applications
• Metal-to-metal capacitance characterization
• Wafer interconnect capacitance mapping
• Nano-device and quantum-structure terminal capacitance
• High-frequency device characterization and material evaluation
– Compatibility & Integration
• Module form factor for 4200A-SCS mainframe integration
• Compatible with analytical probers and cryogenic controllers from MPI, Cascade MicroTech, Lucas Labs/Signatone, MicroManipulator, Wentworth Laboratories, and LakeShore
• Integrates with 4200-CVIV Multi-Switch for automated C-V/I-V switching without recabling
• Controlled via Clarius+ software
