The Keysight 10766A Linear Interferometer is a high-precision optical sensor for single-axis displacement and velocity measurement. Built with thermally stable stainless steel housing and metric threads, it delivers sub-nanometer resolution through electronic resolution extension. The device functions as either a fixed or moving component within a measurement system, supporting differential configurations where both reflector and interferometer can move independently. It integrates directly into Keysight laser interferometer systems and the 5530 Laser Calibration System.
Technical Specifications
• Measurement Type: Linear displacement and velocity
• Measurement Axis: Single axis
• Housing Material: Stainless steel, thermally stable
• Fastening: Metric threads
• Beam Size: 6 mm (0.24 in)
• Beam Separation: 11 mm (0.43 in)
• Fundamental Optical Resolution: λ/2 (316.5 nm, 12.5 µin)
• Resolution with 32× Electronic Extension: λ/64 (10 nm, 0.4 µin)
• Resolution with 256× Electronic Extension: λ/512 (1.2 nm, 0.047 µin)
• Weight: 312 g (11 oz)
– Key Features
• Optically identical to Keysight 10702A Option 001
• Movable or stationary configuration for flexible system architecture
• Beam bending capability for custom optical paths
• Detachable reference reflector for differential measurement setups
• Direct compatibility with Keysight 5530 Laser Calibration System
– Required and Optional Components
• Required Reflector: Keysight 10767A Linear Reflector
• Alternative Reflector: Keysight 10703A Linear Reflector
• Mount: Keysight 10785A (height adjuster and post)
• Base Plate: Keysight 10784A
– Compatible Measurement Kits
• Keysight 55280A (includes 10766A and two 10767A reflectors)
• Keysight 55280B (includes all optics and mounting hardware)
