The MKS Instruments 640A13TW1M32K-S is an electronic pressure controller (EPC) delivering closed-loop absolute pressure control in compact, self-contained form. It integrates a Baratron® capacitance manometer, normally closed proportioning control valve, and field-tunable control electronics for precision regulation across demanding process environments.
Technical Specifications
Pressure Control & Measurement
• Absolute pressure control via integrated Baratron® capacitance manometer
• Control accuracy: ±0.2% of Full Scale
• Measurement accuracy: ±0.5% of Reading (linearity, hysteresis, repeatability included)
• Full Scale pressure range: 10 Torr to 100 psi (specific range for this model available from 10, 100, 1000 mmHg or 60, 100 psi configurations)
• Orifice #3 valve: 5000 sccm nominal flow capacity
Electrical Interface
• Power: ±15 VDC ±5%, 200 mA maximum
• Input/Output: 0–5 VDC or 0–10 VDC (user-selectable)
• Connector: 15-pin male Type D
• RFI sensitivity: <0.2% of Full Scale per SAMA 33.1, 1-abc
Control & Monitoring
• Proportional and Integral tuning: field-adjustable via rotary switches
• Trip points: two open-collector transistors (250 mA @ 30 VDC), adjustable 1–100% of Full Scale with LED status indicators
Mechanical
• Valve: normally closed, proportioning type with metal seat/plug
• Seal materials: metal standard; elastomer options include Kalrez®, Viton®, Kel-F®, Chemraz®
• Wetted materials: 316L S.S., 316L/VAR S.S., Inconel, Nickel
• Fittings: Swagelok 4 VCR Male
– Key Features
• Baratron® technology eliminates silicone oil fill for wide measurement dynamic range
• Metal seals with elastomer upgrade options for chemical compatibility
• Field-adjustable control loop tuning for application-specific optimization
• Dual alarm outputs with independent setpoints
– Typical Applications
Process pressure regulation in semiconductor manufacturing, vacuum systems, laboratory research, and industrial gas delivery where accurate absolute pressure control and rapid response are required.
– Compatibility & Integration
Standard 15-pin Type D connector simplifies integration into existing control architectures. Linear 0–5 or 0–10 VDC command and feedback signals enable direct interface with PLC, DAQ, and analog control systems.
