The Queensgate Instruments QC103 is a high-precision capacitive displacement sensor engineered for demanding metrology, microscopy, and semiconductor manufacturing applications. It delivers sub-nanometer to picometer resolution with exceptional stability and linearity, supported by 24-bit digital signal processing and a fast 20 µs control loop update rate. The sensor operates across measurement ranges up to 11 mm with high-order linearization (4th order or higher), enabling nanopositioning systems to achieve picometer-level position noise of just tens of picometers. Built on over 40 years of piezo-actuated flexure-guided stage expertise, the QC103 combines analog and digital control interfaces—including USB, RS-232C, step/direction, and 14-bit parallel connectivity—with trigger I/O for camera synchronization and external equipment integration. Lifetime exceeds 5 years under typical operating conditions.
Technical Specifications
• Measurement Principle: Capacitance micrometry for displacement sensing
• Resolution: Sub-nanometer to picometer levels
• Measurement Range: Up to 11 mm for capacitive nanosensors
• Stability: Exceptional across the operating envelope
• Linearity: High-order (4th order or higher) with superior resolution
• Signal Processing: 24-bit digital data resolution
• Control Loop Update Rate: 20 µs
• Position Noise: Stage position noise as low as tens of picometers
• Lifetime: Greater than 5 years
– Electrical Specifications
• Voltage Drive: −30 V to +150 V drive
• Continuous Current: 120 mA standard
• Electronic Noise: Ultra-low, enabling picometer-level position stability
– Control Interfaces
• Analog: Command and position output
• Digital: 14-bit parallel, USB, RS-232C
• Motion Control: Step and direction / quadrature inputs
• Triggering: Trigger inputs and outputs for external camera and equipment synchronization
– Typical Applications
• High-precision microscopy and imaging systems
• Nanopositioning metrology
• Semiconductor manufacturing process control
• Research-grade displacement measurement
