The Stanford Research Systems RGA300 is a quadrupole residual gas analyzer that identifies and quantifies partial pressures across a mass range of 1 to 300 amu. It delivers high sensitivity with selectable Faraday cup or electron multiplier detection, enabling precise leak detection, contaminant identification, and vacuum system optimization in research and production environments.
Technical Specifications
• Mass Range: 1 to 300 amu
• Resolution: Better than 0.5 amu at 10% peak height (AVS std. 2.3); adjustable to constant peak width
• Detection Limit:
– Faraday Cup: 5 × 10⁻¹¹ Torr
– Electron Multiplier: 5 × 10⁻¹⁴ Torr
• Sensitivity (N₂ at 28 amu, 1 amu full peak width, 70 eV electron energy, 12 eV ion energy, 1 mA emission):
– Faraday Cup: 2 × 10⁻⁴ A/Torr
– Electron Multiplier: <200 A/Torr
• Dynamic Range: 6 decades
• Ionizer: Electron impact ionization with open, cylindrically symmetric ion source
• Filament: Dual thoriated-iridium (ThO₂/Ir), field-replaceable
• Degassing: Built-in electron impact desorption for ion source cleaning
• Filament Protection: Firmware-driven overpressure detection at 675 Hz; automatic shutdown above threshold
– Key Features
• Dual detector options—Faraday cup (standard) or electron multiplier (optional) for extended sensitivity range
• Probe assembly mounts to standard 2.75" Conflat (CF) flange; requires 2.5" clearance
• Stainless steel construction with self-aligning components for simplified post-cleaning reassembly
• High-temperature bakeout-capable probe; Electronics Control Unit (ECU) separates for independent thermal processing
• Real-time Windows software with intuitive graphical interface, split-screen dual-mode operation, and linear/logarithmic scaling (manual or automatic)
• LED status indicators for power, filament, degas, electron multiplier, RS-232 activity, error, overpressure, and filament burnout
– Compatibility & Integration
Electronics Control Unit:
• Dimensions: 9.1" W × 4.1" H × 3.1" D
• Power: +24 VDC at 2.5 A external, or optional built-in module for 110/120/220/240 VAC line operation
• RS-232 interface for probe control and data acquisition
