The Stanford Research Systems UGA200 is a benchtop quadrupole mass spectrometer for real-time gas mixture analysis across atmospheric pressure to ultra-high vacuum environments. This universal gas analyzer delivers sub-ppm sensitivity and sub-0.2-second response times, making it suitable for semiconductor exhaust monitoring, vacuum process analysis, leak detection, and research applications requiring fast, accurate gas composition data.
Technical Specifications
Mass Spectrometry
• Quadrupole RGA with 200 amu mass range
• Resolution better than 0.5 amu at 10% of peak height
• Faraday cup and electron multiplier detectors (electron multiplier standard)
• Sensitivity less than 1 ppm
• Operating pressure 5 × 10⁻⁶ Torr
• Response time less than 0.2 seconds
• Startup time eight minutes from full stop
Sampling Inlet
• Two-stage pressure-reducing inlet
• Atmospheric pressure to UHV operation (1 mbar to 1 bar, 10⁻¹ to 10⁻⁴ Torr, <10⁻⁴ Torr for UHV)
• Flow rate 1 to 10 mL/min at atmospheric pressure
• 1/4 inch ID Tygon tube, 1/8" Ultra-Torr®, or 2.75" CF port connections
• Stainless steel and PEEK capillary options; optional multi-capillary inlet available
System Performance
• Bakeout temperature up to 120 °C with regulated heaters
• Operates in highly corrosive environments
• Stainless steel construction
Electrical & Physical
• Input power 85–264 VAC or 120–370 VDC, 47–63 Hz or DC
• Power consumption 720 W
• Internal operation 24 VDC
• Dimensions 12" × 11" × 27" (W × H × L)
• Weight 85 lbs
• Vertical or horizontal placement supported
– Key Features
• Windows software with graphical user interface
• Analog and histogram scan modes; pressure vs. time plotting
• Integrated leak detection and gas library
• Remote control of valves, heaters, and pumps via RS-232 or Ethernet
• Front-panel and computer-based control
• On-line help documentation
– Typical Applications
Semiconductor exhaust gas monitoring, glove box analysis, fuel cell studies, Freon detection, pollution monitoring, fermentation studies, and general vacuum research and development.
– Compatibility & Integration
RS-232 and Ethernet connectivity. Multi-port 16-channel sample inlet, turbo pump venting port, and hydrogen detection option (UGA-Hydrogen, Option 03) available.
