The Advanced Energy MDX-10K is a 10 kW DC magnetron power supply for thin-film deposition and sputtering applications. It delivers stable, precise power with 0.25% regulation accuracy across Power, Current, and Voltage modes. The supply features ARC-OUT™ arc suppression and exceptionally low stored energy through high-frequency conversion techniques, enabling 5 µs response to plasma load changes. Three voltage tap configurations (Standard Z, Low Z, High Z) accommodate various magnetron impedances, while automatic limiting protects against load mismatch conditions. Programmable ramp and run timers, combined with multiple control interfaces, support flexible process integration.
Technical Specifications
• Output Power: 10 kW
• Regulation Modes: Power, Current, Voltage
• Regulation Accuracy: 0.25% in all modes
• Ripple: 1% RMS at 100 kHz
• Ignition Voltage: 1550 V
• Response Time: 5 µs to plasma load changes
• Ramp Timer: 0 to 99.0 minutes, programmable
• Run Timer: Continuous or 0 to 99.0 minutes, programmable
– Voltage Configuration
• Standard Z Taps: 500–600 V, 600–800 V, 800–1000 V
• Low Z Taps: 400–500 V, 500–640 V, 640–800 V
• High Z Taps: 600–775 V, 775–1000 V, 1000–1250 V
– Key Features
• ARC-OUT™ circuit reduces arc-induced splatter and thermal shock
• ARC-CHECK™ optional feature for impedance restoration
• Extremely low stored energy design
• Automatic limiting under overcurrent, overvoltage, or overpower conditions
• Forced-air cooling
• 71 lb weight; 25″ height
– Electrical & Control
• Input Voltage: 208 V ± 10%, 380 V ± 10%, 415 V ± 10% (3-phase, 50/60 Hz)
• Input Current: 34 A
• Control Interfaces: Front panel, user port (RS-232 ASCII), analog remote control
• Analog Signals: 0–5 V for voltage, current, and power control
• Logic I/O: Interlock, output, and setpoint status outputs
• Interlock Inputs: Vacuum, water, system interlocks supported
– Operating Environment
• Temperature: 0 to 45°C ambient
• Humidity: 92% relative humidity, non-condensing
• Clearance Required: 3″ rear, 1″ side minimum
