The Advanced Energy MDX-L12M is a 12 kW DC magnetron power supply engineered for demanding thin-film deposition and sputtering applications. It delivers precise, stable power with advanced arc management and operates continuously in both laboratory and industrial environments. The unit functions as a configurable power, current, or voltage source, supporting semiconductor manufacturing, thin-film processing, and precision material deposition workflows.
Technical Specifications
Power Output: 12 kW nominal
Input Voltage: 90–260 VAC
Efficiency: Up to 92% from line to load
Output Regulation Modes: Power, current, or voltage source selection
Striking Voltage: Soft-start options at 1500 V or 800 V available
– Key Features
• Advanced Arc Management: VARC (Vacuum Arc/Discharge Control) suppresses and quenches arc events with adjustable suppression timing. Impedance sensing immediately terminates power delivery to prevent energy dumping into hotspots, reducing target burn-in and material loss.
• Dual Digital Meters: Front-panel displays show power, current, voltage, ramp time, and setpoints in real time.
• Intuitive Control Interface: Front-panel voltage, current, and output power adjustment with LED status indicators for arc detection, setpoint reached, ramp progression, plasma presence, output status, and interlock conditions (water, vacuum, auxiliary).
• Industrial Communication: RS-232, Ethernet/IP, PROFINET, and Modbus RTU/TCP protocols enable remote operation and integration into multi-component systems.
• Remote Operation & Data Logging: Rear-panel switches control remote functionality; 25-pin sub-miniature D connector facilitates control signaling and data logging.
– Typical Applications
Semiconductor thin-film deposition, magnetron sputtering, laboratory instrumentation, machine and robotic control systems.
– Compatibility & Integration
Supports multiple communication standards for networked operation. Configurable output modes accommodate diverse load impedances and process requirements.
