The Electroglas EG5 is a precision wafer prober engineered for semiconductor device characterization and quality control in both production and laboratory environments. Built for 300 mm wafers, the system delivers ±1.0 micron positioning accuracy across three linear axes with 40 ms probing speed and <0.1% non-linearity error. High-speed axis travel at 500 mm/s maximizes throughput while the motorized split probe chuck (200 mm × 300 mm) streamlines sample access and setup.
## Technical Specifications
• **Wafer Size:** 12-inch (300 mm)
• **Scanning Range:** 300 mm
• **Positioning Accuracy:** ±1.0 micron stepping
• **Probing Speed:** 40 ms
• **Probe Chuck:** 200 mm × 300 mm with motorized split design
• **Non-Linearity:** <0.1%
• **Linear Axes Travel Speed:** 500 mm/s
• **Operating Temperature Range:** −60°C to +200°C
## Key Features
• Three-axis motorized stage system for precise XYZ sampling and measurement
• 500 programmable states with built-in calibration functions for rapid test setup
• Multi-probe support: Kelvin, LCR, IV, and RF probe compatibility
• Low non-linearity error ensures high accuracy and measurement repeatability
## Typical Applications
• High-volume semiconductor device production testing
• Detailed device characterization and failure analysis
• Temperature-dependent parametric measurements
• Automated wafer mapping and data correlation
## Compatibility & Integration
• **Tester Interfaces:** GPIB or RS-232 (configuration-dependent)
• **Automation Systems:** ASYST SMIF-300FL Input/Output compatible
• **Temperature Control:** TEMPTRONIC Titan series integration
• **Vision and Mapping:** Optical Character Recognition (OCR), auto-alignment, and real-time wafermap data support
