The Keithley 6517B is a precision electrometer and high resistance meter engineered for low-level measurements spanning picoampere currents to teraohm resistances. With a 6½-digit display and input impedance exceeding 200 TΩ, it delivers exceptional sensitivity across current, voltage, resistance, and charge measurements. The instrument integrates a ±1 kV source with fast settling times and includes GPIB and RS-232 interfaces for automated test systems.
Technical Specifications
Measurement Ranges:
• Current: 10 aA to 20 mA
• Voltage: 1 µV to 200 V (250 V peak maximum)
• Resistance: 1 Ω to 10¹⁸ Ω
• Charge: 1 fC to 2 µC
Input Performance:
• Input Impedance: > 200 TΩ (20 pF typical, < 2 pF guarded)
• Input Bias Current: < 3 fA at calibration temperature; 0.5 fA/°C coefficient
• Input Bias Current Noise: < 0.75 fA p-p (0.1–10 Hz bandwidth, 20 pA range)
• Burden Voltage: < 20 µV on lowest current ranges
• Reading Rate: 425 readings/s to internal buffer; 400 readings/s via IEEE-488
Voltage Source:
• Output Range: ±1 kV
• Maximum Current: ±10 mA at 100 V; ±1 mA at 1000 V
• Settling Time: < 8 ms (100 V range); < 50 ms (1000 V range)
• Output Noise: < 4.7 mV RMS (100 V); < 5.1 mV RMS (1000 V)
– Key Features
• Hardware short-circuit protection on both voltage ranges
• Analog output: 2 V full-scale with 10 kΩ nominal impedance
• Guard output for Volts measurements; configurable as inverting amplifier for Amps and Coulombs modes
• TTL-compatible external trigger input
• Compact form factor: 90 mm × 214 mm × 369 mm; 5.4 kg
– Typical Applications
Research and development, quality control, materials characterization, surface analysis, and semiconductor testing requiring ultra-low current or ultra-high resistance measurements.
– Compatibility & Integration
GPIB (IEEE-488) and RS-232 communication. Operates from 100 V AC, 120 V AC, 220 V AC, or 240 V AC supply. Environmental operating range: 0 °C to 50 °C; maximum altitude 2000 m.
