The RECIF Technologies TBFF15 ANA is an automatic wafer notch finder engineered for precise alignment of 200mm semiconductor wafers. This tabletop system leverages RECIF’s industrialized alignment technology, proven across standalone and OEM installations, to deliver accurate notch and flat positioning critical to downstream manufacturing processes. The TBFF15 ANA aligns batches of wafers with repeatability better than ±1° and initiates alignment automatically upon cassette placement, with post-alignment angle selection configurable via user interface.
Technical Specifications
• Model: TBFF15 ANA
• Wafer Compatibility: 200 mm (8 inch)
• Alignment Accuracy: ±1° or better
• Alignment Type: Automatic notch aligner (ANA)
• Batch Processing: Yes—simultaneous alignment of multiple wafers
• Cleanroom Rating: ISO 4 (Class 10 FS209E)
• Materials: Antistatic polyoxymethylene body; antistatic EPDM rollers
• CE Mark: Yes
• Origin: France
– Key Features
• Automatic start upon cassette placement eliminates manual intervention
• 360° batch rotation mode enables visual inspection without removal
• User-selectable post-alignment angle positioning
• Antistatic construction meets ESD requirements for fab environments
• Cassette-based batch handling optimizes throughput
– Typical Applications
• Wafer orientation qualification in process lines
• Pre-process notch alignment for lithography and doping steps
• Incoming wafer verification and lot segregation
• Integration into semi-automated material handling chains
– Compatibility & Integration
The TBFF15 ANA accepts standard wafer cassettes and operates in cleanroom environments per ISO 4 specifications. As a tabletop unit, it integrates into both standalone and OEM-embedded workflows within semiconductor manufacturing facilities.
