The Stanford Research Systems PPR100 is a vacuum process monitoring system that combines a residual gas analyzer with a dual-path inlet design for simultaneous base vacuum and operating pressure diagnostics. The system delivers precision gas composition analysis across production and laboratory environments through interchangeable pressure-reducing orifices and high-conductivity pathways.
Technical Specifications
Residual Gas Analyzer
• Mass range options: 100, 200, or 300 amu
• Detector: Faraday cup and electron multiplier (both standard)
• Detection limit: 1 × 10⁻¹² Torr
• Dynamic range: 6 orders of magnitude
• Mass resolution: Better than 1 amu
Inlet System
• Dual-path configuration with high-conductivity and pressure-reducing paths
• Selectable orifices for 0.01, 0.1, 1.0, or 10 Torr inlet pressures
• Pressure reduction to approximately 10⁻⁶ Torr at RGA detector
• 2.75″ CF flange connection (rotatable, through-hole design)
• Gas flow rate: 3 × 10⁻⁵ Torr·L/s (pressure-reducing inlet active)
Vacuum Pumping
• Turbo pump: Hybrid turbomolecular/drag design, 70 L/s
• Backing pump: Oil-free diaphragm type
• Turbo ultimate pressure: 2 × 10⁻⁹ mbar
• Backing pump ultimate pressure: <1 mbar
Performance
• Response time: 2 seconds at 0.1 Torr inlet pressure (scales linearly)
• Nominal startup time: 8 minutes
Control & Interfaces
• Integrated controller with Windows RGA application
• Operating modes: Analog scan, histogram, pressure vs. time
• RS-232C interface: 28,800 baud, 9-pin D connector
Electrical & Physical
• Power: 110 VAC @ 60 Hz or 220 VAC @ 50 Hz; 300 W total
• Protection class: IP44
• Weight: 16 lbs (RGA probe assembly), 33 lbs (pump and controller)
• Forced air cooling required
– Key Features
• Oil-free pumping eliminates process contamination risk
• Interchangeable inlet orifices for flexible pressure monitoring
• Dual detection pathways handle both vacuum and process pressures
• 6-decade dynamic range captures composition across wide pressure ranges
– Typical Applications
• Inline coating and deposition process monitoring
• Vacuum system diagnostics and leak detection
• Process gas composition verification
• Real-time chamber atmosphere analysis
– Compatibility & Integration
The system accepts standard 2.75" CF flanges and interfaces via RS-232C serial communication. SRS instruments typically support Ethernet and GPIB protocols across product lines.
