The Stanford Research Systems RGA100 is a residual gas analyzer for real-time vacuum chamber composition monitoring and analysis. It identifies leaks, contaminants, and process-related gases across a 1–100 amu mass range with sub-amu resolution and detection limits as low as 5 × 10⁻¹⁴ Torr (with electron multiplier). The instrument captures six orders of magnitude dynamic range in a single scan, enabling simultaneous measurement of trace and bulk gas species. A temperature-compensated logarithmic electrometer detects ion currents from 10⁻¹⁵ to 10⁻⁷ amps with better than 2% precision. The dual thoriated-iridium filament is user-replaceable and includes firmware-driven overpressure protection. Faraday cup and optional electron multiplier detectors accommodate both standard and ultrahigh-sensitivity applications. RS-232 and optional Ethernet interfaces support integration into automated vacuum control systems.
Technical Specifications
• Mass range: 1–100 amu
• Resolution: Better than 1 amu; better than 0.5 amu at 10% peak height (AVS std. 2.3); adjustable constant peak width across mass range
• Detection limit (Faraday cup): 5 × 10⁻¹¹ Torr
• Detection limit (electron multiplier, optional): 5 × 10⁻¹⁴ Torr
• Dynamic range: Six orders of magnitude per scan; ion current detection from 10⁻¹⁵ to 10⁻⁷ amps at better than 2% precision
• Sensitivity (Faraday cup): 2 × 10⁻⁴ A/Torr (N₂ at 28 amu, 70 eV electron energy, 12 eV ion energy, 1 mA emission current)
• Sensitivity (electron multiplier): <200 A/Torr (user adjustable)
• Ionizer: Open ion source with cylindrical symmetry; electron impact ionization; built-in degassing via electron impact desorption
• Power supply: External +24 VDC at 2.5 A via DB9 connector; optional AC module (110/120/220/240 VAC)
• Probe flange: Standard 2.75" ConFlat (CF)
• Probe length: 8.75" from flange face; requires 2.5" internal clearance
• Minimum tube ID: 1.375"
• ECU dimensions: 3.1" × 4.1" × 9.1" (separable for high-temperature bakeout)
• Weight: 6 lbs
– Key Features
• Dual thoriated-iridium filament with field-replaceable design
• Firmware-driven filament protection with overpressure shutdown
• Stainless steel probe with self-aligning components for rapid reassembly
• Optional electron multiplier for trace-level analysis
• Logarithmic electrometer for single-scan dynamic range capture
– Interfaces & Integration
• Standard RS-232 with high-level command set for program integration
• Optional Ethernet connectivity
• Detachable electronics control unit for independent vacuum system operation
