The Stanford Research Systems RGA100 is a high-precision residual gas analyzer built to quantify gas composition within vacuum systems with exceptional sensitivity and dynamic range. It detects and measures trace gases from 1 to 100 amu, enabling vacuum system integrity monitoring across semiconductor manufacturing, materials research, and scientific vacuum applications. The instrument combines a rugged probe design with flexible detector options and field-replaceable components, delivering reliable performance in demanding high and ultra-high vacuum environments.
Technical Specifications
Mass Range & Resolution
• Mass range: 1 to 100 amu
• Resolution: Better than 0.5 amu at 10% peak height (AVS std. 2.3), adjustable to maintain constant peak width; alternatively stated as better than 1 amu
Detectors
• Faraday cup (FC) — standard configuration
• Electron multiplier (EM) — optional
Sensitivity
• Faraday cup: 2 × 10⁻⁴ A/Torr (N₂, 28 amu)
• Electron multiplier: <200 A/Torr (N₂, 28 amu), user-adjustable across full high voltage range
Detection Performance
• Minimum detectable partial pressure (FC): 5 × 10⁻¹¹ Torr
• Minimum detectable partial pressure (EM): 5 × 10⁻¹⁴ Torr (1 amu peak width, 70 eV electron energy, 12 eV ion energy, 1 mA emission current)
• Dynamic range: Six orders of magnitude per scan
Ionization & Detection Electronics
• Open ion source with cylindrical symmetry and electron impact ionization
• Temperature-compensated logarithmic electrometer: 10⁻⁷ to 10⁻¹⁵ A range, better than 2% precision
• Dual thoriated-iridium (ThO₂/Ir) filament — long-life, field-replaceable design with firmware overpressure protection
• Built-in degassing via electron impact desorption
Operating Envelope
• Pressure range: High and ultra-high vacuum environments, detection down to 5 × 10⁻¹⁴ Torr
– Key Features
• Mounts on standard 2.75" Conflat® flange
• 2.5" probe clearance requirement — comparable to standard ion gauge
• Minimal outgassing design with self-aligning components for quick reassembly after cleaning
• Separate electronics control unit (ECU): 9.1" × 4.1" × 3.1" (W × H × L)
• Field-replaceable filament requiring minutes for user installation
– Typical Applications
• Vacuum system conditioning and outgassing analysis
• Semiconductor process monitoring
• Materials and surface science research
• Leak detection in high-vacuum systems
• Trace gas identification and quantification
– Compatibility & Integration
The modular probe/ECU architecture allows independent placement. Probe connectivity via standard Conflat flanges ensures straightforward integration into existing vacuum chambers and systems.
