The Keysight E5263A is a dual-channel IV analyzer and Source/Monitor Unit (SMU) built for high-precision device characterization across research, development, and production environments. This system combines one High Power SMU and one Medium Power SMU in a single mainframe, delivering current measurement to 5 pA resolution and voltage sourcing to 200 V. The integrated EasyEXPERT group+ software provides intuitive GUI-based measurement setup, execution, and data analysis with automated workspace management.
Technical Specifications
Measurement Performance
• Current measurement: 5 pA to 1 A
• Voltage measurement: 100 µV to 200 V
• Current resolution: 5 pA
• Accuracy: Specified at module connector terminals under controlled conditions (23°C ±5°C, 40-minute warm-up, less than ±1°C ambient change post-calibration, within one hour of auto-calibration)
Sourcing Capabilities
• Maximum current source: 1 A
• Maximum voltage source: 200 V
• Voltage compliance: Up to ±100 V
• Current compliance: Up to ±200 mA
• Both channels operate simultaneously without power restrictions
Measurement Modes
Spot measurement, pulsed spot measurement (500 µs minimum pulse width), quasi-pulsed spot measurement, staircase sweep, multi-channel sweep, pulsed sweep, staircase sweep with pulsed bias, linear search, and binary search.
– Key Features
• Dual-channel configuration: one High Power SMU and one Medium Power SMU
• High-speed analog-to-digital converter for enhanced measurement fidelity
• Integrated Ground Unit (GNDU) with 0 V forcing and 2.2 A sink capability
• 16 general-purpose digital I/Os for system integration
• BNC trigger connectors for synchronization
• GPIB port with FLEX command set support
– Typical Applications
Semiconductor device characterization, IV curve analysis, leakage current measurement, compliance testing, and parametric device analysis in wafer-level and packaged-device environments.
– Compatibility & Integration
EasyEXPERT group+ software enables keyboard and mouse operation with graphical display, automated analysis, and Excel/image export. Built-in workspace stores test conditions and measurement data automatically. Compatible with semiautomatic wafer prober systems for integrated test flow.
