The Keysight M9615A is a PXIe five-channel precision Source/Measure Unit (SMU) engineered for high-density test applications requiring simultaneous voltage and current sourcing with measurement capability. The module delivers exceptional channel density—five SMU channels in a single PXIe form factor—reducing cost and footprint per channel compared to conventional multi-channel instruments.
Each channel sources up to 30 V and 500 mA with measurement resolution to 6 µV and 10 pA respectively. Dual voltage output ranges (6 V and 30 V) optimize accuracy across different signal levels. The instrument supports both DC and pulsed measurements, with pulse widths as narrow as 100 µs at a sampling rate of 500 kSa/s per channel, enabling dynamic circuit characterization.
A key architectural advantage is the seamless current measurement ranging function, which eliminates range-change delays by switching across four current measurement ranges without settling delays. This maximizes measurement throughput while extending dynamic measurement range within the 500 mA limit.
Technical Specifications
Output and Measurement Ranges
• Voltage output: 6 V and 30 V ranges
• Current output: Up to 500 mA per channel
• Voltage measurement resolution: 6 µV minimum
• Current measurement resolution: 10 pA minimum
• Current measurement: Four seamless ranging options
Pulsed Operation
• Minimum pulse width: 100 µs
• Sampling rate: 500 kSa/s per channel
Noise and Settling (with PX0107A Low Noise Filter Adapter)
• Voltage noise: 25 µVrms (6 V range), 110 µVrms (30 V range) across 10 Hz to 20 MHz
• Settling time: 5.5 ms (6 V range), 17.5 ms (30 V range)
• Maximum capacitive load: 5 µF
Connectivity
• D-sub 25-pin connectors per channel
• Terminal configuration: High Force (HF), Low Force (LF), High Sense (HS), Low Sense (LS), and Guard (G)
• Measurement modes: Two-wire and four-wire configurations supported
• External connections: Trigger and interlock terminals available via orderable connector-terminal block (M9615-87001)
– Key Features
• Five independent SMU channels in single PXIe module
• Seamless current ranging eliminates measurement delays
• Dual voltage ranges optimize precision across dynamic signal levels
• Four-wire sensing for accurate low-current measurements
• Guard terminal for low-current measurement capability
– Typical Applications
• Semiconductor device reliability testing
• Integrated circuit (IC) characterization and validation
• Multi-channel parametric testing requiring high precision
• Dynamic pulse testing with narrow pulse widths
– Compatibility & Integration
The M9615A requires a PXIe chassis and integrates with Keysight’s modular test ecosystem. The optional PX0107A Low Noise Filter Adapter reduces voltage source noise for sensitive measurements.
