The HP/Agilent 4140B is a precision picoammeter and DC voltage source instrument for semiconductor device and material characterization. It combines femtoampere-level current measurement sensitivity with dual programmable voltage sources to enable leakage current analysis, I-V characteristic mapping, and quasi-static C-V measurements. Designed for new product development, yield improvement, and production quality control in semiconductor manufacturing, the 4140B delivers the measurement accuracy and programmable sweep capabilities required for comprehensive electrical property evaluation.
Technical Specifications
Picoammeter Performance
• Measurement range: 0.001 × 10⁻¹² A to 1.999 × 10⁻² A
• Maximum resolution: 1 × 10⁻¹⁵ A
• Accuracy: 0.5%
• Display: 3.5 digit with exponential notation
• Zero offset: Compensates stray capacitance (up to 100 pF) and test lead leakage (up to 100 × 10⁻¹⁵ A)
• Input: Triaxial connector
Voltage Sources
• Two independent programmable sources
• Output range: −100 V to +100 V
• Resolution: 10 mV
• Current limit: 100 µA, 1 mA, or 10 mA (selectable)
Sweep and Ramp Functions
• Stable DC source mode
• Ramp generator: 0.001 V/s to 1.000 V/s
• Staircase generator (double and single configurations)
• Hold time and step delay programmable
• Voltage sweep controls: AUTO/START, MAN (PAUSE), STEP, ABORT
Integration and Measurement Control
• Selectable integration times (Short, Medium, Long) at 50 Hz; multiply by 5/6 for 60 Hz operation
• HP-IB (IEEE 488) interface for remote programming and system integration
• Analog output for I-V and C-V data plotting
– Key Features
• Femtoampere-level sensitivity eliminates need for external electrometer stages
• Triaxial input terminal minimizes environmental noise and capacitive coupling
• Dual voltage sources enable parametric sweeping and multi-point characterization
• Programmable ramp and staircase generators for automated test sequences
• Full remote control via HP-IB for system integration and batch measurement
– Typical Applications
• Semiconductor leakage current and breakdown voltage measurement
• I-V characteristic extraction for diodes, transistors, and integrated circuits
• Quasi-static C-V profiling of MOS and junction devices
• Insulation resistance and dielectric absorption assessment
• Material electrical property evaluation
– Compatibility & Integration
HP-IB (IEEE 488) interface enables instrument control, parameter programming, and data acquisition within automated test systems. Analog output supports real-time I-V and C-V curve plotting on compatible recording equipment. BNC output connectors standard.
