The MKS Instruments HPS 937 Gauge Controller is a half-rack pressure measurement and control instrument engineered for multi-sensor operation across ultra-high vacuum to atmospheric pressure ranges. The 937A variant accommodates up to five sensors simultaneously, while the 937B supports six sensors, enabling flexible system configurations for diverse vacuum applications.
Measurement spans 1 × 10⁻¹¹ Torr to 20,000 Torr depending on sensor selection. The controller accepts cold cathode (Series 421, 423, I-Mag, HPS Inverted Magnetron), Pirani (Series 345), convection Pirani (Series 317), capacitance manometer (Baratron Series 622, 626, 722, dual modules), thermocouple (DV-6M equivalent), and absolute piezo transducer (Series 902) sensors, providing measurement granularity across the entire vacuum spectrum.
Technical Specifications
Measurement Range:
• 1 × 10⁻¹¹ Torr to 20,000 Torr (sensor-dependent)
• 1 × 10⁻¹¹ Torr to 10⁴ Torr (937A)
• 1 × 10⁻¹¹ Torr to 760 Torr standard; higher with optional capacitance manometer card (937B)
• 1 × 10⁻¹¹ Torr to 2.7 × 10⁴ mbar
• 1 × 10⁻⁹ Torr to 2.7 × 10⁶ Pascal
• 1 × 10⁻⁸ Torr to 1 × 10⁷ microns
Sensor Channels:
• Five sensors maximum (937A)
• Six sensors maximum (937B)
Set Points:
• Twelve pressure-dependent SPDT relay set points (937B)
• Range: 2.0 × 10⁻¹⁰ to 9.5 × 10³ Torr or 5.0 × 10⁻¹⁰ to 950 Torr (937A, sensor-dependent)
Display:
• 320 × 240 color QVGA TFT LCD with backlighting (937B)
• Simultaneous readout for all connected sensors
– Key Features
• Relay set point control
• Integrated leak test mode
• Analog output signals
• Sensor wire break detection (Pirani, thermocouple, convection Pirani)
• Front panel control lock
• Zero and atmospheric calibration modes
• Modular, field-upgradeable design
– Compatibility & Integration
Standard communications: RS-232, RS-485. Optional Profibus interface available for 937B. Supports user-configurable units of measure and setup review functionality.
