The Stanford Research Systems CIS100 is a Closed Ion Source Gas Analyzer for precise quantitative gas composition measurement in laboratory and industrial environments. It combines a quadrupole mass spectrometer with an integrated CIS ionizer in a compact 2.75″ Conflat® flange probe, enabling direct chamber connection for on-line process monitoring, gas purity verification, residual gas analysis, and leak detection without sample preparation or external ionizer modules.
Technical Specifications
• Mass Range: 100 amu
• Detection Limit: 1 ppm (electron multiplier), 10 ppm (Faraday cup), 1 × 10⁻¹² Torr
• Maximum Operating Pressure: 10 mTorr
• Resolution: Better than 0.1 amu
• Mass Stability: ±0.1 amu after 30 minutes
• Warm-up Time: Peak height ±2% after 3 minutes
• Power Requirement: 24 VDC @ 2.5 A (optional AC line module available)
• Computer Interface: RS-232C, 28,800 baud
• Physical: 6 lbs, compact probe design with integrated control unit
– Key Features
• Gold-plated stainless steel ionizer reduces outgassing and resists reactive gases
• Tungsten filament tolerates corrosive environments including WF₆ and silane exposure
• Dual detector configuration: Faraday cup and continuous dynode electron multiplier
• Field-replaceable electron multiplier and filament for minimal downtime
• Windows-based software supports up to eight ECUs with real-time RGA analysis
• Programmable mass scale tuning, sensitivity calibration, and ionizer setup
• User-selectable output units: ppm, Torr, mbar, Pa, A
• Data export in ASCII format; image export as META files or clipboard
• Programmable alarms and electron multiplier gain adjustment
– Typical Applications
• On-line process gas monitoring and closed-loop control
• Process gas purity verification at sub-ppm levels
• High-vacuum residual gas analysis
• Equipment leak detection and isolation
– Compatibility & Integration
Requires connection to a pumping system with minimum 40 L/s effective pumping speed and base pressure below 10⁻⁹ Torr. Optional O100TDP provides integrated turbo pump and diaphragm roughing pump for direct mounting.
