The Stanford Research Systems RGA300 is a quadrupole residual gas analyzer for real-time gas composition measurement and leak detection in vacuum systems. It covers the mass range 1 to 300 amu with better than 0.5 amu resolution at 10% peak height and delivers six decades of dynamic range. The system pairs a quadrupole probe with a compact electronics control unit and Windows-based software, enabling precise partial pressure monitoring down to 5 × 10⁻¹⁴ Torr with the optional electron multiplier detector.
Technical Specifications
• Mass Range: 1 to 300 amu
• Mass Filter: Quadrupole
• Resolution: Better than 0.5 amu @ 10% peak height; adjustable for constant peak width across mass range
• Dynamic Range: 6 decades
• Detectors: Faraday cup (standard) or electron multiplier (optional)
• Sensitivity (Faraday cup): 2 × 10⁻⁴ A/Torr
• Sensitivity (Electron multiplier): < 200 A/Torr, user adjustable
• Minimum Detectable Partial Pressure (Faraday cup): 5 × 10⁻¹¹ Torr
• Minimum Detectable Partial Pressure (Electron multiplier): 5 × 10⁻¹⁴ Torr
• Filament: Dual ThO₂/Ir configuration
• Operating Temperature (max.): 70 °C
• Probe Mounting: Standard 2.75" Conflat® flange
• ECU Power Input: +24 VDC (2.5 A) external supply; optional AC module available
• ECU Dimensions: 3.1" W × 4.1" D × 9.1" H
– Key Features
• Firmware-driven over-pressure monitoring at 675 Hz with automatic filament shut-off protection
• Integrated electron impact desorption for ion source cleaning and degassing
• Probe design with self-aligning parts for simplified reassembly after maintenance
• Minimal internal component count to reduce outgassing
• ECU separates easily from probe for high-temperature bakeout operations
• Status indicators for electron multiplier, filament, electronics, and probe health
– Software & Connectivity
• RGA Windows software with LabVIEW drivers
• Data acquisition, analysis, probe control, and ionizer setup functions
• Mass scale tuning and sensitivity calibration capabilities
• Electron multiplier gain adjustment controls
• Data export to ASCII (spreadsheet compatible) and graphic formats (PNG, BMP, TIFF, JPG, SVG, PDF)
• Selectable pressure units: Torr, mbar, Pa, A
• Password protection and programmable audio/visual alarms
• RS-232 interface; optional Ethernet adapter
– Typical Applications
• Vacuum process monitoring
• Gas purity analysis in processing chambers
• Leak detection and helium tracer studies
• Residual gas profiling in deposition and etching systems
