The Keithley 4201-SMU is a medium-power Source-Measure Unit (SMU) module for the Keithley 4200A-SCS Parameter Analyzer that combines voltage and current sourcing with integrated measurement capabilities for precision DC I-V characterization. Operating in four-quadrant mode, it delivers stable low-current measurements across high load capacitance environments—critical for semiconductor devices, LCD displays, and nanoFET testing where long cables and complex fixtures introduce parasitic capacitance.
Technical Specifications
Electrical Performance
• Current source/measure range: ±100 mA
• Voltage source/measure range: ±210 V
• Current measurement resolution: 100 fA
• Voltage measurement resolution: 0.2 µV
• Maximum power dissipation: 2 Watts
• Load capacitance tolerance: up to 10 µF (medium power configuration); 1 µF stable at 1–100 pA; 1,000× higher capacitance capability than conventional SMUs at lowest current measurement range
Measurement Capability
• DC I-V characterization
• Very Low Frequency C-V (10 mHz to 10 Hz)
• Quasi-Static Capacitance-Voltage (QSCV)
Signal Integrity
• 2-wire and 4-wire (Kelvin) connection modes
• Shielded triaxial terminals with active guarding for low-noise operation
– Key Features
• Enhanced low-current stability for measurements into high-impedance devices
• Field-replaceable module design minimizes system downtime during upgrades
• Extended load capacitance tolerance—1,000× improvement over traditional SMUs at picoampere scales
• Integrated active guarding eliminates external preamp requirements for standard low-current work
– Typical Applications
• Semiconductor device characterization and parametric testing
• LCD display manufacturing and quality assurance
• Nanostructure and nanoFET electrical characterization
• High-impedance and capacitive load measurement in production environments
– Compatibility & Integration
Designed exclusively for integration into Keithley 4200A-SCS Parameter Analyzer mainframes. Optional pairing with the 4200-PA Remote Preamp extends measurement resolution to 10 aA. Operates under Clarius Software control.
