The Stanford Research QMS100 is a quadrupole mass spectrometer for residual gas analysis and vacuum diagnostics. It detects and quantifies gas species and contaminants within vacuum systems across a mass range of 1 to 100 amu. Built on a two-stage pressure-reducing inlet system, the QMS100 samples gases at atmospheric pressures (10 mbar to 1 bar) and conditions them for analysis by a high-vacuum quadrupole mass analyzer. A capillary inlet reduces pressure by three decades, followed by a hybrid turbomolecular/drag pump stage that achieves approximately 10⁻⁶ Torr analysis conditions. Solenoid valves govern gas flow throughout the system.
Technical Specifications
• Mass range: 1 to 100 amu
• Mass resolution: Better than 1 amu
• Dynamic range: 6 decades
• Detection limit: As low as 5 × 10⁻¹⁴ Torr (with optional electron multiplier)
• Response time: Less than 0.5 seconds
• Sampling pressure: 10 mbar to 1 bar
• Sampling flow rate: Several milliliters per minute
• Measurement rate: Up to 25 points per second for individual masses
• Detector options: Faraday cup or electron multiplier
– Key Features
• Compact transportable design: 7.06″ W × 17.25″ H × 24.80″ D, 75 lbs
• Stainless steel and PEEK capillary with Viton, buna-N, and nitrile butyl rubber seals
• Alumina and ceramic insulators
• Power: 110 VAC / 60 Hz or 220 VAC / 50 Hz (non-selectable)
– Typical Applications
• On-line process monitoring
• Gas species analysis
• Leak detection
• Vacuum system diagnostics and troubleshooting
– Compatibility & Integration
• Standard RS-232 computer interface
• RGA Windows software included
• Optional Ethernet connectivity and LabVIEW driver support
